• High
performance high vacuum evacuation with compact and
unit construction for easy connection to vacuum
containers
• Composed of rotary
pump and diffusion pump systems, and both air-cooling
and water-cooling types available
• Simplified Pirani
gauge and liquid nitrogen trap are standard attachment
• Equipped with following
safety circuit:
· Prevention of automatic restoration after stop
of rotary pump
· Protection against overload of rotary pomp motor
· Prevention of unusual heating of diffusion pump
· Prevention of over-current of heater of diffusion
pump
· Warning of cooling water pressure lowering of
diffusion pump with switching off function of
diffusion pump
•Application :
• Various
pumping systems
•Product specification
.
Water-cooling series
Model
DS-212Z
DS-312Z
DS-412Z
DS-612Z
Final pressure (Pa)
X 10-4 in the order of 10
(when liquid nitrogen unused)
