DIAVAC LIMITED
Vacuum components

DPA series | DPF series [Water-cooling series] [Air-cooling series]


Oil diffusion pump  


Oil diffusion pump: DPF-□□Z, water-cooling series

DPF-10Z
•Features
High vacuum is easily achieved by multi-staged structure of the boiler part that can fractionate oil to lower vapor pressure.
Adoption of high capacity jet enables evacuation speed to be large enough.
Jet is composed by the assembly system. By loosening bolt and nut of the top nozzle, it is completely disassembled to easily clean nozzle at each stage.
Easy heater replacement.

•Application to:
   various pumping systems form compact to large one (electron microscope, analyzer, electron beam welder, metallurgical systems, etc.)

•Product specification
Model 2Z 3Z 4Z 6Z 8Z 10Z 14Z
Evacuation speed*1 L/s
Without baffle 125 280 380 810 1450 2070 3600
With baffle 58 150 215 465 790 1200 2350
Final pressure Pa*2 click
Full load critical back-pressure*3 Pa 20 15
Reversed oil flow mg/cm2 min
Without baffle
Water-cooled baffle
X 10-2
X 10-4
X 10-2
X 10-4
X 10-2
X 10-4
X 10-2
X 10-4
X 10-2
X 10-4
X 10-2
X 10-4
X 10-2
X 10-4
Operating oil*4 Group A Lion-S
Group B Silicone F-5
Oil volume mL 50 100 150 340 500 820 1600
Power source V/ф 100/1 100/1 100/1 200/1 200/1 200/1 200/3

Power W

Group A 330 500 700 1000 1400 1900 4500
Group B 400 650 900 1300 1800 2500 6000
Startup time min 15 20 20 20 25 25 30
Required water volume*5 L/min 0.5 1.0 1.5 3.0 4.0 5.0 7.0
Mass kg 4 6 8 20 30 41 120
Exterior dimension drawing [PDF]
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*1: The evacuation speed is the measure which was based on JISB8317-1.From DPF-2Z to DPF-14Z. It measures with the our company ionization vacuum gauge. The use operating oil.:lion S
*2: It measures final pressure with the our company ionization vacuum gauge.The use operating oil.:lion S
*3: The no load critical back-pressure is the measure which was based on JISB8317-2.From DPF-2Z to DPF-14Z. It measures with the our company pirani vacuum gauge. The use operating oil.:lion S
*4: The use operating oil of group A is preparing Neovac-SX and silicon F-4 as the option.
*5: Use the temperature of the cooling water of the oil diffusion pump to equal to or less than 30 ºC of the exit side from equal to or more than 10 ºC of the sides of the entrance.
* As for the large-sized type, contact from DPF-14 to the our company's sales and give.
* As for exterior shape, specification shall be subject to change without prior notice for improvement.



Oil diffusion pump : DPF-4ZA, air-cooling series

DPF-4ZA
•Features
no need for cooling water due to forced air-cooling by fan
air-cooling baffle is a standard attachment
power source is 100VAC, 2-phased
components are identical with those for water-cooling type except for cooling part (fan, fan-motor)

•Application :
   various compact exhausting apparatus
   research and experimental laboratory apparatus

•Product specification
Model DPF-2ZA DPF-3ZA DPF-4ZA
Evacuation speed With baffle L/s 58 150 215
Final pressure Pa X 10-5 with baffle, at room temperature
Full load critical back-pressure Pa 20
Reversed oil flow mg/cm2 min 7.5 X 10-4
Operating oil Neoback-SX Lion-S SiliconeF-4
Oil volume mL 50 100 150
Power source V/ф 100/1
Power heater W 330 500 700
Fan motor 50/60Hz W 9/10 14/13 40/42
Startup time min 15 20
Mass kg 4.7 7.5 10.0
Exterior dimension drawing [PDF]
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*As for exterior shape, specification shall be subject to change without prior notice for improvement





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